Location & Availability for: Nanofabrication using focused ion and el

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Nanofabrication using focused ion and electron beams : principles and applications /

edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Book Cover
Names: Utke, Ivo. | Moshkalev, Stanislav. | Russell, Phillip,
Published: Oxford ; Oxford University Press, 2012.
Series: Oxford series on nanomanufacturing.
Topics: Nanostructured materials. | Nanotechnology. | Electron beams - Industrial applications. | Ion bombardment - Industrial applications.
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University of Illinois at Urbana-Champaign

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Location & Availability for: Nanofabrication using focused ion and el