Location & Availability for: Polymers in microlithography : materials

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Polymers in microlithography : materials and processes : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989 /

Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.

Book Cover
Names: Reichmanis, Elsa, | MacDonald, Scott A. | Iwayanagi, Takao,
Published: Washington, DC : American Chemical Society, 1989.
Series: ACS symposium series ; 412.
Topics: Polymers - Congresses. | Photoresists - Congresses. | Microlithography - Materials - Congresses. | Polymères - Congrès. | Résines photosensibles - Congrès. | Microlithographie - Matériaux - Congrès.
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University of Illinois at Urbana-Champaign

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Location & Availability for: Polymers in microlithography : materials