Location & Availability for: Low-k nanoporous interdielectrics : mate

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Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties /

Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

Book Cover
Main Author: Ree, Moonhor.
Other Names: Yoon, Jinhwan. | Heo, Kyuyoung.
Published: Hauppauge, N.Y. : Nova Science Publishers, c2010.
Series: Nanotechnology science and technology series.
Topics: Dielectric films. | Microelectronics - Materials. | Porous materials. | Interconnects (Integrated circuit technology)
Genres: Electronic books.
Online Access: Link to Low-k nanoporous interdielectrics (access limited to Benedictine University patrons)
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Location & Availability for: Low-k nanoporous interdielectrics : mate